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Easy to operate and install
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High reliability and maintainability |
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Have warning and alarm record |
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Have temp. trend record (seven days data)
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No coolant leak concern during PM or power off (close loop design)
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Auto recovery remote set point temp. when the line of remote set point disconnect with chiller |
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N2 purge function option during PM and no impact with other chamber
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For variety processes in semiconductor and LCDˇKindustry |
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PLC control (no power drop issue. etc.) |
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No leak pump and inverter control
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Energy save design-real time hot gas design
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Two temperature sensor and three control methods which can change chiller performance to suit different process using |
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CMS function option |
